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The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD
Joint Authors
Abdulraheem, Yaser M.
Arockia-Thai, Lidia
Zachariah, Suji K.
Ghoraishi, Sahar
Ghannam, Moustafa
Source
Advances in Materials Science and Engineering
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-05-22
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
Titanium dioxide thin films were deposited on crystalline silicon substrates by electron beam physical vapor deposition.
The deposition was performed under vacuum ranging from 10−5 to 10−6 Torr without process gases, resulting in homogeneous TiO2-x layers with a thickness of around 100 nm.
Samples were then annealed at high temperatures ranging from 500°C to 800°C for 4 hours under nitrogen, and their structural and optical properties along with their chemical structure were characterized before and after annealing.
The chemical and structural characterization revealed a substoichiometric TiO2-x film with oxygen vacancies, voids, and an interface oxide layer.
It was found from X-ray diffraction that the deposited films were amorphous and crystallization to anatase phase occurred for annealed samples and was more pronounced for annealing temperatures above 700°C.
The refractive index obtained through spectroscopic ellipsometry ranged between 2.09 and 2.37 in the wavelength range, 900 nm to 400 nm for the as-deposited sample, and jumped to the range between 2.23 and 2.65 for samples annealed at 800°C.
The minimum surface reflectance changed from around 0.6% for the as-deposited samples to 2.5% for the samples annealed at 800°C.
American Psychological Association (APA)
Abdulraheem, Yaser M.& Ghoraishi, Sahar& Arockia-Thai, Lidia& Zachariah, Suji K.& Ghannam, Moustafa. 2013. The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD. Advances in Materials Science and Engineering،Vol. 2013, no. 2013, pp.1-10.
https://search.emarefa.net/detail/BIM-481975
Modern Language Association (MLA)
Abdulraheem, Yaser M.…[et al.]. The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD. Advances in Materials Science and Engineering No. 2013 (2013), pp.1-10.
https://search.emarefa.net/detail/BIM-481975
American Medical Association (AMA)
Abdulraheem, Yaser M.& Ghoraishi, Sahar& Arockia-Thai, Lidia& Zachariah, Suji K.& Ghannam, Moustafa. The Effect of Annealing on the Structural and Optical Properties of Titanium Dioxide Films Deposited by Electron Beam Assisted PVD. Advances in Materials Science and Engineering. 2013. Vol. 2013, no. 2013, pp.1-10.
https://search.emarefa.net/detail/BIM-481975
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-481975