Collective Micro-Optics Technologies for VCSEL Photonic Integration

Abstract EN

We describe the main recent technological approaches that associate micro-optical elements to VCSELs in order to control their output beam and to improve their photonic integration.

These approaches imply either a hybrid assembly or a direct integration technique.

They are compared with regards to their tolerance to alignment errors and to their ease of implementation onto arrays of devices at a wafer level.

In particular, we detail the integration techniques we have developed for self-aligned polymer microlens fabrication for beam collimation and short distance beam focusing.

Finally, designs to achieve active micro-optics or to exploit novel nanophotonic effects are discussed.