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Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer
Joint Authors
Chang, Chien-Kuo
Lin, Chii-Ruey
Chang, Hong-Ming
Source
International Journal of Photoenergy
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-03-11
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
This study intends to deposit high transmittance diamond-like carbon (DLC) thin films on D263T glass substrate at room temperature via a diamond powder target using the radio frequency (RF) magnetron sputtering technique.
Moreover, various process parameters were used to tune the properties of the thin films by using the Taguchi method.
Experimental results show that the content of sp3 bonded carbon decreases in accordance with the effect of the substrate temperature.
In addition, the hardness of all as-deposited single-layer DLC films ranges from 13.2 to 22.5 GPa, and the RMS surface roughness was improved significantly with the decrease in sputtering pressure.
The water repellent of the deposited DLC films improved significantly with the increase of the sp3 content, and its contact angle was larger than that of the noncoated one by 1.45 times.
Furthermore, the refraction index (n) of all as-deposited DLC films ranges from 1.95 to 2.1 at λ = 600 nm.
These results demonstrate that the thickness increased as the reflectance increased.
DLC film under an RF power of 150 W possesses high transmissive ability (>81%) and low average reflectance ability (<9.5%) in the visible wavelengths (at λ = 400–700 nm).
American Psychological Association (APA)
Lin, Chii-Ruey& Chang, Hong-Ming& Chang, Chien-Kuo. 2013. Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer. International Journal of Photoenergy،Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-485036
Modern Language Association (MLA)
Lin, Chii-Ruey…[et al.]. Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer. International Journal of Photoenergy No. 2013 (2013), pp.1-8.
https://search.emarefa.net/detail/BIM-485036
American Medical Association (AMA)
Lin, Chii-Ruey& Chang, Hong-Ming& Chang, Chien-Kuo. Fabrication of High Transparency Diamond-Like Carbon Film Coating on D263T Glass at Room Temperature as an Antireflection Layer. International Journal of Photoenergy. 2013. Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-485036
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-485036