Integrated MEMSNEMS Resonant Cantilevers for Ultrasensitive Biological Detection
Joint Authors
Li, Xinxin
Li, Yong Xiang
Gan, Xiaohua
Xu, Pengcheng
Yu, Haitao
Liu, Min
Li, Jungang
Xia, Xiaoyuan
Source
Issue
Vol. 2009, Issue 2009 (31 Dec. 2009), pp.1-10, 10 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-06-23
Country of Publication
Egypt
No. of Pages
10
Main Subjects
Abstract EN
The paper reviews the recent researches implemented in Chinese Academy of Sciences, with achievements on integrated resonant microcantilever sensors.
In the resonant cantilevers, the self-sensing elements and resonance exciting elements are both top-down integrated with silicon micromachining techniques.
Quite a lot of effort is focused on optimization of the resonance mode and sensing structure for improvement of sensitivity.
On the other hand, to enable the micro-cantilevers specifically sensitive to bio/chemical molecules, sensing materials are developed and modified on the cantilever surface with a self-assembled monolayer (SAM) based bottom-up construction and surface functionalization.
To improve the selectivity of the sensors and depress environmental noise, multiple and localized surface modifications are developed.
The achieved volume production capability and satisfactory detecting resolution to trace-level biological antigen of alpha-fetoprotein (AFP) give the micro-cantilever sensors a great promise for rapid and high-resoluble detection.
American Psychological Association (APA)
Li, Xinxin& Yu, Haitao& Gan, Xiaohua& Xia, Xiaoyuan& Xu, Pengcheng& Li, Jungang…[et al.]. 2009. Integrated MEMSNEMS Resonant Cantilevers for Ultrasensitive Biological Detection. Journal of Sensors،Vol. 2009, no. 2009, pp.1-10.
https://search.emarefa.net/detail/BIM-487169
Modern Language Association (MLA)
Li, Xinxin…[et al.]. Integrated MEMSNEMS Resonant Cantilevers for Ultrasensitive Biological Detection. Journal of Sensors No. 2009 (2009), pp.1-10.
https://search.emarefa.net/detail/BIM-487169
American Medical Association (AMA)
Li, Xinxin& Yu, Haitao& Gan, Xiaohua& Xia, Xiaoyuan& Xu, Pengcheng& Li, Jungang…[et al.]. Integrated MEMSNEMS Resonant Cantilevers for Ultrasensitive Biological Detection. Journal of Sensors. 2009. Vol. 2009, no. 2009, pp.1-10.
https://search.emarefa.net/detail/BIM-487169
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-487169