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Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials
Author
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-20, 20 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-07-31
Country of Publication
Egypt
No. of Pages
20
Main Subjects
Materials Science , Minerals
Civil Engineering
Abstract EN
X-ray reflectometry is a powerful tool for investigations on rough surface and interface structures of multilayered thin film materials.
The X-ray reflectivity has been calculated based on the Parratt formalism, accounting for the effect of roughness by the theory of Nevot-Croce conventionally.
However, in previous studies, the calculations of the X-ray reflectivity often show a strange effect where interference effects would increase at a rough surface.
And estimated surface and interface roughnesses from the X-ray reflectivity measurements did not correspond to the TEM image observation results.
The strange result had its origin in a used equation due to a serious mistake in which the Fresnel transmission coefficient in the reflectivity equation is increased at a rough interface because of a lack of consideration of diffuse scattering.
In this review, a new accurate formalism that corrects this mistake is presented.
The new accurate formalism derives an accurate analysis of the X-ray reflectivity from a multilayer surface of thin film materials, taking into account the effect of roughness-induced diffuse scattering.
The calculated reflectivity by this accurate reflectivity equation should enable the structure of buried interfaces to be analyzed more accurately.
American Psychological Association (APA)
Fujii, Yoshikazu. 2013. Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials. Journal of Materials،Vol. 2013, no. 2013, pp.1-20.
https://search.emarefa.net/detail/BIM-489763
Modern Language Association (MLA)
Fujii, Yoshikazu. Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials. Journal of Materials No. 2013 (2013), pp.1-20.
https://search.emarefa.net/detail/BIM-489763
American Medical Association (AMA)
Fujii, Yoshikazu. Recent Developments in the X-Ray Reflectivity Analysis for Rough Surfaces and Interfaces of Multilayered Thin Film Materials. Journal of Materials. 2013. Vol. 2013, no. 2013, pp.1-20.
https://search.emarefa.net/detail/BIM-489763
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-489763