NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering

Joint Authors

Tomar, Monika
Gupta, Vinay
Sharma, Savita
Puri, Nitin K.

Source

Conference Papers in Science

Issue

Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-5, 5 p.

Publisher

Hindawi Publishing Corporation

Publication Date

2014-04-10

Country of Publication

Egypt

No. of Pages

5

Main Subjects

Natural & Life Sciences (Multidisciplinary)

Abstract EN

Tungsten trioxide (WO3) thin films were deposited by Rf-magnetron sputtering onto Pt interdigital electrodes fabricated on corning glass substrates.

NO2 gas sensing properties of the prepared WO3 thin films were investigated by incorporation of catalysts (Sn, Zn, and Pt) in the form of nanoclusters.

The structural and optical properties of the deposited WO3 thin films have been studied by X-ray diffraction (XRD) and UV-Visible spectroscopy, respectively.

The gas sensing characteristics of all the prepared sensor structures were studied towards 5 ppm of NO2 gas.

The maximum sensing response of about 238 was observed for WO3 film having Sn catalyst at a comparatively lower operating temperature of 200°C.

The possible sensing mechanism has been highlighted to support the obtained results.

American Psychological Association (APA)

Sharma, Savita& Tomar, Monika& Puri, Nitin K.& Gupta, Vinay. 2014. NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering. Conference Papers in Science،Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-490239

Modern Language Association (MLA)

Sharma, Savita…[et al.]. NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering. Conference Papers in Science No. 2014 (2014), pp.1-5.
https://search.emarefa.net/detail/BIM-490239

American Medical Association (AMA)

Sharma, Savita& Tomar, Monika& Puri, Nitin K.& Gupta, Vinay. NO2 Sensing Properties of WO3 Thin Films Deposited by Rf-Magnetron Sputtering. Conference Papers in Science. 2014. Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-490239

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references

Record ID

BIM-490239