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Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates
Joint Authors
Kortidis, I.
Kiriakidis, G.
Moschovis, K.
Skarvelakis, R.
Source
Issue
Vol. 2009, Issue 2009 (31 Dec. 2009), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2009-07-02
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
InOx thin films with a thickness of the order of 100 nm were grown by dc magnetron sputtering on glass, Si and flexible (PET) substrates.
The electrical conductivity of InOx thin films exhibited a change of two orders of magnitude during photoreduction with ultraviolet light and subsequent oxidation in ozone concentrations from 2370 to 15 ppb, at room temperature.
Optical transparency of over 85% for all substrates was maintained.
Film structural and ozone sensing properties were analyzed.
Surface morphology investigations carried out by SEM for films on PET substrates showed extended surface cracking for bending angles beyond 40∘.
Optimization of growth conditions has led to films with extremely low detection levels for ozone down to 15 ppb at room temperature, demonstrating the wide prospective of utilizing these metal oxides as gas sensors on flexible substrates for a variety of automotive and air-conditioning applications.
American Psychological Association (APA)
Kiriakidis, G.& Moschovis, K.& Kortidis, I.& Skarvelakis, R.. 2009. Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates. Journal of Sensors،Vol. 2009, no. 2009, pp.1-5.
https://search.emarefa.net/detail/BIM-493871
Modern Language Association (MLA)
Kiriakidis, G.…[et al.]. Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates. Journal of Sensors No. 2009 (2009), pp.1-5.
https://search.emarefa.net/detail/BIM-493871
American Medical Association (AMA)
Kiriakidis, G.& Moschovis, K.& Kortidis, I.& Skarvelakis, R.. Highly Sensitive InOx Ozone Sensing Films on Flexible Substrates. Journal of Sensors. 2009. Vol. 2009, no. 2009, pp.1-5.
https://search.emarefa.net/detail/BIM-493871
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-493871