High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6NAlN Superlattice Structure
Joint Authors
Jiang, Haiying
Li, Jinping
Huang, Yimei
Yin, Jianqin
Han, Yanbin
Shi-gang, Hu
Xia, Yingjie
Li, Zhiming
Source
Advances in Condensed Matter Physics
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-5, 5 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-04-08
Country of Publication
Egypt
No. of Pages
5
Main Subjects
Abstract EN
The highly conductance of Mg-doped Al0.3Ga0.7N layer using low-pressure metal organic chemical vapour deposition (MOCVD) on Al0.4Ga0.6N/AlN superlattice structure was reported.
The rapid thermal annealing (RTA) has been employed for the effective activation and generation of holes, and a minimum p-type resistivity of 3 Ω·cm for p-type Al0.3Ga0.7N was achieved.
The RTA annealing impacted on electrical, doping profile and morphological properties of Mg-doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN superlattice structure have been also discussed.
The quality of Mg-doped Al0.3Ga0.7N with Al0.4Ga0.6N/AlN superlattice structure degraded after annealing from HRXRD.
At appropriate annealing temperature and time, surface morphology of Mg-doped Al0.3Ga0.7N can be improved.
A step-like distribution of [Mg] and [H] in p-type Al0.3Ga0.7N was observed, and thermal diffusion direction of [Mg] and [H] was also discussed.
American Psychological Association (APA)
Li, Zhiming& Li, Jinping& Jiang, Haiying& Han, Yanbin& Xia, Yingjie& Huang, Yimei…[et al.]. 2014. High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6NAlN Superlattice Structure. Advances in Condensed Matter Physics،Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-497865
Modern Language Association (MLA)
Li, Zhiming…[et al.]. High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6NAlN Superlattice Structure. Advances in Condensed Matter Physics No. 2014 (2014), pp.1-5.
https://search.emarefa.net/detail/BIM-497865
American Medical Association (AMA)
Li, Zhiming& Li, Jinping& Jiang, Haiying& Han, Yanbin& Xia, Yingjie& Huang, Yimei…[et al.]. High Conductivity of Mg-Doped Al0.3Ga0.7N with Al0.4Ga0.6NAlN Superlattice Structure. Advances in Condensed Matter Physics. 2014. Vol. 2014, no. 2014, pp.1-5.
https://search.emarefa.net/detail/BIM-497865
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-497865
