Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy
Joint Authors
Neves, Bernardo R. A.
Oliveira, Camilla K. B. Q. M.
Siles, Pablo F.
Archanjo, Bráulio S.
Baptista, Daniel L.
Source
Advances in Materials Science and Engineering
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-13, 13 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-09-19
Country of Publication
Egypt
No. of Pages
13
Main Subjects
Engineering Sciences and Information Technology
Abstract EN
This work reports on nanoscale and microscale metal oxide gas sensors, consisting of metal-semiconductor-metal barriers designed via scanning probe microscopy.
Two distinct metal oxides, molybdenum and titanium oxides, were tested at different temperatures using CO2 and H2 as test gases.
Sensitivities down to ppm levels are demonstrated, and the influence of dry and humid working atmospheres on these metal oxide conductivities was studied.
Furthermore, the activation energy was evaluated and analyzed within working sensor temperature range.
Finally, full morphological, chemical, and structural analyses of the oxides composites are provided allowing their identification as MoO3 and TiO2-x.
American Psychological Association (APA)
Archanjo, Bráulio S.& Siles, Pablo F.& Oliveira, Camilla K. B. Q. M.& Baptista, Daniel L.& Neves, Bernardo R. A.. 2013. Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy. Advances in Materials Science and Engineering،Vol. 2013, no. 2013, pp.1-13.
https://search.emarefa.net/detail/BIM-506485
Modern Language Association (MLA)
Archanjo, Bráulio S.…[et al.]. Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy. Advances in Materials Science and Engineering No. 2013 (2013), pp.1-13.
https://search.emarefa.net/detail/BIM-506485
American Medical Association (AMA)
Archanjo, Bráulio S.& Siles, Pablo F.& Oliveira, Camilla K. B. Q. M.& Baptista, Daniel L.& Neves, Bernardo R. A.. Characterization of Metal Oxide-Based Gas Nanosensors and Microsensors Fabricated via Local Anodic Oxidation Using Atomic Force Microscopy. Advances in Materials Science and Engineering. 2013. Vol. 2013, no. 2013, pp.1-13.
https://search.emarefa.net/detail/BIM-506485
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-506485