Scanning Optical Head with Nontilted Reference Beam : Assuring Nanoradian Accuracy for a New Generation Surface Profiler in the Large-Slope Testing Range

Abstract EN

Nanoradian Surface Profilers (NSPs) are required for state-of-the-art synchrotron radiation optics and high-precision optical measurements.

Nano-radian accuracy must be maintained in the large-angle test range.

However, the beams' notable lateral motions during tests of most operating profilers, combined with the insufficiencies of their optical components, generate significant errors of ∼1 μrad rms in the measurements.

The solution to nano-radian accuracy for the new generation of surface profilers in this range is to apply a scanning optical head, combined with nontilted reference beam.

I describe here my comparison of different scan modes and discuss some test results.