Process-Parameter-Dependent Structural, Electrical, and Optical Properties of Reactive Magnetron Sputtered Ag-Cu-O Films
Joint Authors
Uthanna, Suda
Reddy, P. Narayana
Pierson, J. F.
Reddy, M. Hari Prasad
Sreedhar, A.
Source
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-08-15
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Engineering Sciences and Information Technology
Chemistry
Abstract EN
Silver-copper-oxide thin films were formed by RF magnetron sputtering technique using Ag80Cu20 target at various oxygen partial pressures in the range 5 × 10−3–8 ×10−2 Pa and substrate temperatures in the range 303–523 K.
The effect of oxygen partial pressure and substrate temperature on the structure and surface morphology and electrical and optical properties of the films were studied.
The Ag-Cu-O films formed at room temperature (303 K) and at low oxygen partial pressure of 5 × 10−3 Pa were mixed phase of Ag2Cu2O3 and Ag, while those deposited at 2 × 10−2 Pa were composed of Ag2Cu2O4 and Ag2Cu2O3 phases.
The crystallinity of the films formed at oxygen partial pressure of 2 × 10−2 Pa increased with the increase of substrate temperature from 303 to 423 K.
Further increase of substrate temperature to 523 K, the films were decomposed in to Ag2O and Ag phases.
The electrical resistivity of the films decreased from 0.8 Ωcm with the increase of substrate temperature from 303 to 473 K due to improvement in the crystallinity of the phase.
The optical band gap of the Ag-Cu-O films increased from 1.47 to 1.83 eV with the increase of substrate temperature from 303 to 473 K.
American Psychological Association (APA)
Reddy, P. Narayana& Sreedhar, A.& Reddy, M. Hari Prasad& Uthanna, Suda& Pierson, J. F.. 2011. Process-Parameter-Dependent Structural, Electrical, and Optical Properties of Reactive Magnetron Sputtered Ag-Cu-O Films. Journal of Nanotechnology،Vol. 2011, no. 2011, pp.1-8.
https://search.emarefa.net/detail/BIM-513763
Modern Language Association (MLA)
Reddy, P. Narayana…[et al.]. Process-Parameter-Dependent Structural, Electrical, and Optical Properties of Reactive Magnetron Sputtered Ag-Cu-O Films. Journal of Nanotechnology No. 2011 (2011), pp.1-8.
https://search.emarefa.net/detail/BIM-513763
American Medical Association (AMA)
Reddy, P. Narayana& Sreedhar, A.& Reddy, M. Hari Prasad& Uthanna, Suda& Pierson, J. F.. Process-Parameter-Dependent Structural, Electrical, and Optical Properties of Reactive Magnetron Sputtered Ag-Cu-O Films. Journal of Nanotechnology. 2011. Vol. 2011, no. 2011, pp.1-8.
https://search.emarefa.net/detail/BIM-513763
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-513763