Normalized characteristics of laser-Induced diffusion of arsenic dopants in silicon
Joint Authors
Hamadi, Adi A.
Husayn, Salma M.
Hadi, Asil A. K.
Mahdi, Rana O.
Source
Engineering and Technology Journal
Issue
Vol. 25, Issue 04 (30 Jun. 2007), pp.584-590, 7 p.
Publisher
Publication Date
2007-06-30
Country of Publication
Iraq
No. of Pages
7
Main Subjects
Topics
Abstract AR
في هذا البحث، جرى تقديم الخصائص المقومة للانتشار المحتث بالليزر لشوائب الزرنيخ في السيليكون، يمكن اعتماد هذه الخصائص في محاولة تحسين خصائص النبائط المصنعة من السيليكون المشوب بالزرنيخ، يعزى هذا التحسن في الخصائص إلى الزيادة المتحققة في طول الانتشار خلال طبقة محددة من المنطقة الفعالة في مثل هذه النبائط، تعد تقنية الانتشار المحتث بالليزر تقنية مثالية لتحسين خصائص النبائط الإلكترونية لأنها تتم بشكل مرن و بدون تماس ما بين الآلة و العينة كما أنها نظيفة من حيث مخلفات العمل و يمكن التحكم بها بشكل جيد.
Abstract EN
This work studies the effect of liquid properties (water, solution 0.2-1.5 wt % for each of i-propanol, and n-butane), temperature (26-55 oC) and superficial air velocity (1-15cm / s) on the gas holdup and mass transfer coefficient in air-liquid dispersion column.
The experimental procedure was carried out by QVF column (10 cm i.
d, 1.5 m height) and air bubbling by multi-orifice distributor (2 mm, 49 holes in square pitch).
The experimental results are presented in two and three dimension graphs, these graphs indicate, increases in holdup and mass transfer coefficient with increasing weight percent of alcohols, temperature, and superficial velocity of air.
The gas holdup and mass transfer coefficient are in the following order n-butane > i-propanol > water.
Also the experimental results were correlated by fitting empirical correlations.
Some of the results have been correlated on the basis of drift flux model in order to express the effect of surface active agent on radial uniformity flow and gas holdup profiles.
American Psychological Association (APA)
Hamadi, Adi A.& Husayn, Salma M.& Hadi, Asil A. K.& Mahdi, Rana O.. 2007. Normalized characteristics of laser-Induced diffusion of arsenic dopants in silicon. Engineering and Technology Journal،Vol. 25, no. 04, pp.584-590.
https://search.emarefa.net/detail/BIM-52891
Modern Language Association (MLA)
Husayn, Salma M.…[et al.]. Normalized characteristics of laser-Induced diffusion of arsenic dopants in silicon. Engineering and Technology Journal Vol. 25, no. 04 (2007), pp.584-590.
https://search.emarefa.net/detail/BIM-52891
American Medical Association (AMA)
Hamadi, Adi A.& Husayn, Salma M.& Hadi, Asil A. K.& Mahdi, Rana O.. Normalized characteristics of laser-Induced diffusion of arsenic dopants in silicon. Engineering and Technology Journal. 2007. Vol. 25, no. 04, pp.584-590.
https://search.emarefa.net/detail/BIM-52891
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 587
Record ID
BIM-52891