Investigation of laser assisted etching for preparation silicon nanostructure and diagnostic physical properties
Other Title(s)
استقصاء التنميش المحتث بالليزر لتحضير سليكون ذو بنية نانوية و تشخيص خصائصه الفيزيائية
Joint Authors
Abd al-Karim, Zahrah J.
Hubaytir, Kazim A.
Nayif, Adi Muhsin
Source
Engineering and Technology Journal
Issue
Vol. 33, Issue 4B (30 Apr. 2015), pp.595-601, 7 p.
Publisher
Publication Date
2015-04-30
Country of Publication
Iraq
No. of Pages
7
Main Subjects
Topics
Abstract AR
في ھذا البحث تم تحضیر السلیكون المسامي ذو تركیب نانوي باستخدام التنمیش الكھروكیمیائي – الضوئي (10& 30 mA /cm بتيار تنمیش (n-type) المانح النوع من سیلكون لشریحة (PECE) 2 ( و زمن تنمیش 10) (min.
اثبت حیود الاشعة السینیة (XRD) تكون السیلكون المسامي و أن الحجم البلوري یقل باتجاه الأبعاد النانویة.
بینما بین مجھر القوة الذریة (AFM) البنیة المسامیة للسیلكون المسامي و أن قطر المسام و خشونة السطح تزداد مع تیار التنمیش.
و أخيرا اظھر تحویل فوریر للأشعة تحت الحمراء (FTIR) أن سطح السیلكون المسامي یحتوي على كمیات كبیرة من الأواصر المتدلیة.
Abstract EN
In this paper; nanostructure porous silicon (PS) was prepared by using photoelectrochemical etching (PECE) of n-type silicon at 10 & 30 mA/cm2 etching current density for 10 minute.
X-ray diffraction (XRD) confirms the formation of porous silicon and the crystal size is reduced toward nanometric scale.
The Atomic Force Microscope (AFM) investigation shows the sponge like structure of PS, the width of surface pits and surface roughness increase with etching current density.
Finally, the Fourier Transform Infrared (FTIR) illustrates the PS layer have large amount of dangling bonds.
American Psychological Association (APA)
Abd al-Karim, Zahrah J.& Nayif, Adi Muhsin& Hubaytir, Kazim A.. 2015. Investigation of laser assisted etching for preparation silicon nanostructure and diagnostic physical properties. Engineering and Technology Journal،Vol. 33, no. 4B, pp.595-601.
https://search.emarefa.net/detail/BIM-606586
Modern Language Association (MLA)
Abd al-Karim, Zahrah J.…[et al.]. Investigation of laser assisted etching for preparation silicon nanostructure and diagnostic physical properties. Engineering and Technology Journal Vol. 33, no. 4B (2015), pp.595-601.
https://search.emarefa.net/detail/BIM-606586
American Medical Association (AMA)
Abd al-Karim, Zahrah J.& Nayif, Adi Muhsin& Hubaytir, Kazim A.. Investigation of laser assisted etching for preparation silicon nanostructure and diagnostic physical properties. Engineering and Technology Journal. 2015. Vol. 33, no. 4B, pp.595-601.
https://search.emarefa.net/detail/BIM-606586
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 600-601
Record ID
BIM-606586