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Characterization of tialon layers deposited on tungsten carbide (WC) substrate by physical vapor deposition (PVD)
Author
Source
Arab Journal of Nuclear Sciences and Applications
Issue
Vol. 46, Issue 4 (30 Nov. 2013), pp.189-194, 6 p.
Publisher
The Egyptian Society of Nuclear Science and Applications
Publication Date
2013-11-30
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
Properties of thin films of titanium aluminium nitride (TiAlON) deposited on tungsten carbide substrate (WC-Co) by Magnetron Sputter Ion Plating (MSIP) were studied.
Phase formation, phase transition, hardness and film structure are affected by the percentage of oxygen reactive gas.
In this work the properties of the layers deposited at constant total vacuum pressure 10-2 mbar and constant percentage of nitrogen reactive of 20 % and O2 reactive gas ranging from 1 to 5% were studied.
The investigations were carried out using, X-ray diffraction (XRD), Calotte measurement, nanoindentation, optical scanning microscope (OSM) and tribometer.
The results show that the maximum hardness of the layer of TiAlON was 32 GPa.
American Psychological Association (APA)
al-Awwadi, G. A.. 2013. Characterization of tialon layers deposited on tungsten carbide (WC) substrate by physical vapor deposition (PVD). Arab Journal of Nuclear Sciences and Applications،Vol. 46, no. 4, pp.189-194.
https://search.emarefa.net/detail/BIM-724004
Modern Language Association (MLA)
al-Awwadi, G. A.. Characterization of tialon layers deposited on tungsten carbide (WC) substrate by physical vapor deposition (PVD). Arab Journal of Nuclear Sciences and Applications Vol. 46, no. 4 (Nov. 2013), pp.189-194.
https://search.emarefa.net/detail/BIM-724004
American Medical Association (AMA)
al-Awwadi, G. A.. Characterization of tialon layers deposited on tungsten carbide (WC) substrate by physical vapor deposition (PVD). Arab Journal of Nuclear Sciences and Applications. 2013. Vol. 46, no. 4, pp.189-194.
https://search.emarefa.net/detail/BIM-724004
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 194
Record ID
BIM-724004