Characteristics of the broad beam glow discharge ion source

Abstract EN

The design, construction, characteristics and also applications of a self extraction glow-discharge ion source,namely broad beam ion source are discussed.

A broad beam ion source is achieved to deliver currents of more than 100 μA with applied voltage between anode and cathode of 500 V – 4 kV.

Discharge and ion beam characteristics of this compact multipurpose ion source were studied with different operating conditions using nitrogen gas.

Experimental characteristics of this source and the output ion beam currents are given for a range of operating parameters, e.g.

the gas pressure, the applied voltage and the gap distance between the electrodes, to find out an optimal operating condition.

The influence of varying distance between the anode and the cathode on the discharge and output ion beam characteristics was studied at different gas pressures.

It was found that the optimum distance between the anode and the cathode equals to 3 mm, where maximum output ion beam current and beam energy could be obtained.

At the optimum parameters specimens of Al was etched and the surface morphology of it was investigated.

This specimen was examined by using SEM technique and EDEX spectra which show the precipitation of Cu on Al specimens.