Theoretical treatment of four anode rods saddle field ion source

Abstract EN

The present work investigates that the field lines near the four anode rods ion source axis have a saddle field shape.

Therefore many oscillations of electrons exist and high density discharge is produced at low gas pressures which satisfy with the previously experimental investigations.

The effect of the distance between the four anode rods and the cathode, R, on the trajectories of ions produced at different positions near the source axis were determined.

The theoretical study indicates that, for any ion produced near the source axis as R increases from 10 mm to 18 mm, the final radial distance of the ion trajectory at the cathode surface has a minimum value at R = 14 mm, at maximum ion source current efficiency, which confirms with the previously experimental investigations.