Preparation and characteristics study of diamond-like carbon (DLC)‎ film onn-Si substrates by electrolysis of methanol

Abstract EN

The electrolysis of methanol was used to deposit diamond-like carbon (DLC) film on an-type Si (100) substrate under constant voltage (1200V) at ambient pressure and temperature40oC.

The surface morphology and composition of the synthesized film was characterized by scanning electron microscopy (SEM), energy dispersive x-ray (EDX), atomic force microscopy (AFM), and Raman spectroscopy.Deposited DLC film has a compact structure of dense grains, and the film contained irregular shape particles (clusters) of DLC.

Raman spectraconfirmed that the DLC film contains carbon atoms with sp3hybridization