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Aluminum concentration drives the structural evolution of magnetron sputtering (Ti, Al) C thin film
Author
Source
Engineering and Technology Journal
Issue
Vol. 36, Issue 1A (31 Jan. 2018), pp.70-74, 5 p.
Publisher
Publication Date
2018-01-31
Country of Publication
Iraq
No. of Pages
5
Main Subjects
Topics
Abstract EN
The effect of deposited Al on the structural evolution of TiC films with a chemical composition variation has investigated during combinatorial magnetron sputtering of binary ceramic (Ti, Al) C.
The here produced thin films have been investigated by energy dispersive X-ray spectroscopy (EDX) and X-ray diffraction technique XRD.
The structural evolution of combinatorial magnetron sputtered Ti-Al-C system deposited at room temperature fined to be located in the extent of: Ti at.%= 36.74-60.55, Al at.%= 12.05-30.61 and C at.%= 22.53-47.69.
XRD results show that films are constituted of mostly cubic (Ti, Al) C phase as well as an X-ray amorphous region in the range of Ti at.
%= 37.31-54, Al at.
%= 27.67-30.61 and C at.
%= 22.53-36.92.
A clear evidence for the formation of two different structural regions driving by Al concentration has been observed.
X ray analysis also shows that the (111) orientation in the (Ti, Al) C phase is dominant with increasing the Ti concentration.
American Psychological Association (APA)
al-Ghaban, A.. 2018. Aluminum concentration drives the structural evolution of magnetron sputtering (Ti, Al) C thin film. Engineering and Technology Journal،Vol. 36, no. 1A, pp.70-74.
https://search.emarefa.net/detail/BIM-812380
Modern Language Association (MLA)
al-Ghaban, A.. Aluminum concentration drives the structural evolution of magnetron sputtering (Ti, Al) C thin film. Engineering and Technology Journal Vol. 36, no. 1A (2018), pp.70-74.
https://search.emarefa.net/detail/BIM-812380
American Medical Association (AMA)
al-Ghaban, A.. Aluminum concentration drives the structural evolution of magnetron sputtering (Ti, Al) C thin film. Engineering and Technology Journal. 2018. Vol. 36, no. 1A, pp.70-74.
https://search.emarefa.net/detail/BIM-812380
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 73-74
Record ID
BIM-812380