The effect of compound magnetic–electrostatic lenses insulation on its optical properties

Abstract EN

The present research work takes the intensive studies on two types of electron lenses (magnetic and electrostatic), in order to obtain the preferable design of a compound lens.

The single polepiece magnetic lens models of the same dimension and different structure insulations (iron and air) have been designed and tested.

It was found that the lens with iron insulation has been achieved better optical performance.

Another study has been carried out on a set of asymmetrical electrostatic lenses having different geometries of the outer electrodes.

It was found that the geometrical shape of the outer electrode has a clear effect on the electron optical properties.

The electrostatic retarding lens was inserted inside the magnetic lens in front of the specimen due to improvement in the objective focal properties especially at low beam voltages.

Furthermore, a good resolving power has been obtained from this type of the compound lens in comparison with that of the traditional pure magnetic lens.

The result of the compound lens of the preferable design was compared with those of the published papers; it was found that both results are in good agreement with each other.