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Fabrication and characterization of porous silicon for humidity sensor application
Other Title(s)
تصنيع و توصيف السليكون المسامي لتطبيق متحسس الرطوبة
Joint Authors
Khudayr, Intisar Muhammad
Abd, Huda Najm
Nayif, Adi Muhsin
Mutlak, Falah Abd al-Hasan
Source
Issue
Vol. 16, Issue 39 (31 Dec. 2018), pp.162-170, 9 p.
Publisher
University of Baghdad College of Science
Publication Date
2018-12-31
Country of Publication
Iraq
No. of Pages
9
Main Subjects
Abstract EN
Porous Silicon (PS) layer has been prepared from p-type silicon by electrochemical etching method.
The morphology properties of PS samples that prepared with different current density has been study using atom force measurement (AFM) and it show that the Layer of pore has sponge like stricture and the average pore diameter of PS layer increase with etching current density increase .The x-ray diffraction (XRD) pattern indicated the nanocrystaline of the sample.
Reflectivity of the sample surface is decrease when etching current density increases because of porosity increase on surface of sample.
The photolumenses (PL) intensity increase with increase etching current density.
The PL is affected by relative humidity (RH) level so we can use as humidity sensor.
The electrical resistivity has been increased after PS layer formed due to the variation of the pore size and it was much higher after increase etching current
American Psychological Association (APA)
Abd, Huda Najm& Nayif, Adi Muhsin& Mutlak, Falah Abd al-Hasan& Khudayr, Intisar Muhammad. 2018. Fabrication and characterization of porous silicon for humidity sensor application. Iraqi Journal of Physics،Vol. 16, no. 39, pp.162-170.
https://search.emarefa.net/detail/BIM-866031
Modern Language Association (MLA)
Abd, Huda Najm…[et al.]. Fabrication and characterization of porous silicon for humidity sensor application. Iraqi Journal of Physics Vol. 16, no. 39 (2018), pp.162-170.
https://search.emarefa.net/detail/BIM-866031
American Medical Association (AMA)
Abd, Huda Najm& Nayif, Adi Muhsin& Mutlak, Falah Abd al-Hasan& Khudayr, Intisar Muhammad. Fabrication and characterization of porous silicon for humidity sensor application. Iraqi Journal of Physics. 2018. Vol. 16, no. 39, pp.162-170.
https://search.emarefa.net/detail/BIM-866031
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 169-170
Record ID
BIM-866031