A comparative study on the electrical characteristics of generating plasma by using different target sources
Other Title(s)
دراسة مقارنه للخصائص الكهربائية للبلازما المتولدة من أهداف مختلفة
Joint Authors
Taha, Sarah Khudayr
Khalaf, Muhammad Khammas
Muzhir, Sabah Nuri
Source
Issue
Vol. 15, Issue 4 (31 Dec. 2018), pp.436-440, 5 p.
Publisher
University of Baghdad College of Science for Women
Publication Date
2018-12-31
Country of Publication
Iraq
No. of Pages
5
Main Subjects
Natural & Life Sciences (Multidisciplinary)
Abstract EN
In this research, the electrical characteristics of glow discharge plasma were studied.
Glow discharge plasma generated in a home-made DC magnetron sputtering system, and a DC-power supply of high voltage as input to the discharge electrodes were both utilized.
The distance between two electrodes is 4cm.
The gas used to produce plasma is argon gas which flows inside the chamber at a rate of 40 sccm.
The influence of work function for different target materials (gold, copper, and silver), - 5cm in diameter and around 1mm thickness - different working pressures, and different applied voltages on electrical characteristics (discharge current, discharge potential, and Paschen’s curve) were studied.
The results showed that the discharge current and potential increase by increasing the applied voltage ranging between 300-700 V.
Discharge current increased as working pressure increased in the beginning, and then semi-stabilized (slight increase) starting from 1×100 mbar, while discharge potential decreased at the beginning as working pressure increased and then semi-stabilized at the same point at which discharge current stabilized.
The Paschen’s curves were compared with each other.
It was concluded that the lower breakdown voltage was associated with lower work function of the (Au, Cu, and Ag) cathode material.
Breakdown voltages were (395, 398, and 420) for Ag, Cu and Au respectively
American Psychological Association (APA)
Taha, Sarah Khudayr& Muzhir, Sabah Nuri& Khalaf, Muhammad Khammas. 2018. A comparative study on the electrical characteristics of generating plasma by using different target sources. Baghdad Science Journal،Vol. 15, no. 4, pp.436-440.
https://search.emarefa.net/detail/BIM-866089
Modern Language Association (MLA)
Taha, Sarah Khudayr…[et al.]. A comparative study on the electrical characteristics of generating plasma by using different target sources. Baghdad Science Journal Vol. 15, no. 4 (2018), pp.436-440.
https://search.emarefa.net/detail/BIM-866089
American Medical Association (AMA)
Taha, Sarah Khudayr& Muzhir, Sabah Nuri& Khalaf, Muhammad Khammas. A comparative study on the electrical characteristics of generating plasma by using different target sources. Baghdad Science Journal. 2018. Vol. 15, no. 4, pp.436-440.
https://search.emarefa.net/detail/BIM-866089
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 439-440
Record ID
BIM-866089