تصنيع محس كيميائي من أكسيد القصدير بطريقة التحلل الحراري للرذاذ

Abstract EN

Chemical sensor was prepared by deposition of tin oxide films by chemical spray pyrolysis technique, using tin chloride in deionised water as precursor, on a ceramic substrate having interdigitated electrodes, placed on a hot plate heated to 370 oC.

The solution flow rate, air pressure and distance between spray nozzle and substrate were fixed at 0.8 mL/min, 2 bar and 25 cm respectively.

After deposition process was completed, films were characterized by different methods namely FTIR Spectrometer, UV-VIS Spectrometer, XRD showed polycrystalline structure, and (110) plane was dominate face in SnO2 films, and grain size was 3297nm.

Electrical measurement showed the semiconducting nature of these films, as expected.

Sensors showed good sensitivity toward methanol, ethanol, they detect a concentration of 60 ppm of ethanol and 22 ppm of methanol