Fabrication and characterization of gas sensor from ZrO2 : MgO nanostructure thin films by R.F. magnetron sputtering technique
Other Title(s)
تصنيع متحسس غازي من أغشية MgO : لنانوية باستخدام تقنية الترذيذ الماكنتروني ببلازما الترددات الراديوية ZrO2
Joint Authors
Matar, Mahdi Mahmud
Muhammad, Zaynab Qasim
Salim, Ghassan
Khalil, Suad Ghafuri
Source
Issue
Vol. 16, Issue 1 (sup) (31 Mar. 2019), pp.199-208, 10 p.
Publisher
University of Baghdad College of Science for Women
Publication Date
2019-03-31
Country of Publication
Iraq
No. of Pages
10
Main Subjects
Topics
Abstract EN
Thin films ZrO2: MgO nanostructure have been synthesized by a radio frequency magnetron plasma sputtering technique at different ratios of MgO (0,6, 8 and 10)% percentage to be used as the gas sensor for nitrogen dioxide NO2.
The samples were investigated by X-ray diffraction (XRD), atomic force microscopy (AFM), scanning electron microscopy (SEM), energy-dispersive X-ray (EDX) and sensing properties were also investigated.
The average particle size of all prepared samples was found lower than 33.22nm and the structure was a monoclinic phase.
The distribution of grain size was found lower than36.3 nm and uninformed particles on the surface.
Finally, the data of sensing properties have been discussed, where they indicated that sensitivity reached 42.566% at 300 oC, spectral response time less than 52.2 s and recovery time 135.9 s.
American Psychological Association (APA)
Khalil, Suad Ghafuri& Matar, Mahdi Mahmud& Muhammad, Zaynab Qasim& Salim, Ghassan. 2019. Fabrication and characterization of gas sensor from ZrO2 : MgO nanostructure thin films by R.F. magnetron sputtering technique. Baghdad Science Journal،Vol. 16, no. 1 (sup), pp.199-208.
https://search.emarefa.net/detail/BIM-880892
Modern Language Association (MLA)
Khalil, Suad Ghafuri…[et al.]. Fabrication and characterization of gas sensor from ZrO2 : MgO nanostructure thin films by R.F. magnetron sputtering technique. Baghdad Science Journal Vol. 16, no. 1 (Supplement) (2019), pp.199-208.
https://search.emarefa.net/detail/BIM-880892
American Medical Association (AMA)
Khalil, Suad Ghafuri& Matar, Mahdi Mahmud& Muhammad, Zaynab Qasim& Salim, Ghassan. Fabrication and characterization of gas sensor from ZrO2 : MgO nanostructure thin films by R.F. magnetron sputtering technique. Baghdad Science Journal. 2019. Vol. 16, no. 1 (sup), pp.199-208.
https://search.emarefa.net/detail/BIM-880892
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 207
Record ID
BIM-880892