Plasma spectroscopy diagnostics of V2O5 at a variable of operating power and pressure with radio frequency magnetron sputtering

Other Title(s)

التشخيص الطيفي للبلازما لمادة خامس أوكسيد الفاناديوم في الترذيذ الماكنتروني بالترددات الراديوية مع تغير طاقة التشغيل و الضغط

Joint Authors

Salman, Ibrahim Khalaf
Hasan, Nadim Khalid
Jasim, Hana Isa
Khalaf, Muhammad Khammas

Source

Baghdad Science Journal

Issue

Vol. 16, Issue 1 (sup) (31 Mar. 2019), pp.209-214, 6 p.

Publisher

University of Baghdad College of Science for Women

Publication Date

2019-03-31

Country of Publication

Iraq

No. of Pages

6

Main Subjects

Natural & Life Sciences (Multidisciplinary)

Abstract EN

In this paper, we investigate the basic characteristics of "magnetron sputtering plasma" using the target V2O5.

The "magnetron sputtering plasma" is produced using "radio frequency (RF)" power supply and Argon gas.

The intensity of the light emission from atoms and radicals in the plasma measured by using "optical emission spectrophotometer", and the appeared peaks in all patterns match the standard lines from NIST database and employed are to estimate the plasma parameters, of computes electron temperature and the electrons density.

The characteristics of V2O5 sputtering plasma at multiple discharge provisos are studied at the "radio frequency" (RF) power ranging from 75 - 150 Watt and gas pressure (0.03, 0.05 and 0.007) torr.

One can observe that the intensity of the emission lines increases with increasing the sputtering power.

We find that the electron temperature excess drastically from 0.95 eV to 1.11eV when the emptying gas pressure excess from 0.03 to 0.05 Torr.

On other hand excess electron temperature from 0.9 to 1.01 eV with increasing sputtering power from 100 to 125 Watt, while the electron density decrease from 5.9×1014 to 4.5×1014 cm-3 with increasing sputtering power.

and electron density decrease with increasing of pressure from 4.25×1014 to 2.80×1014 cm-3, But the electron density maximum values 5.9×1014 at pressure 0.03 Torr.

American Psychological Association (APA)

Salman, Ibrahim Khalaf& Khalaf, Muhammad Khammas& Hasan, Nadim Khalid& Jasim, Hana Isa. 2019. Plasma spectroscopy diagnostics of V2O5 at a variable of operating power and pressure with radio frequency magnetron sputtering. Baghdad Science Journal،Vol. 16, no. 1 (sup), pp.209-214.
https://search.emarefa.net/detail/BIM-880893

Modern Language Association (MLA)

Khalaf, Muhammad Khammas…[et al.]. Plasma spectroscopy diagnostics of V2O5 at a variable of operating power and pressure with radio frequency magnetron sputtering. Baghdad Science Journal Vol. 16, no. 1 (Supplement) (2019), pp.209-214.
https://search.emarefa.net/detail/BIM-880893

American Medical Association (AMA)

Salman, Ibrahim Khalaf& Khalaf, Muhammad Khammas& Hasan, Nadim Khalid& Jasim, Hana Isa. Plasma spectroscopy diagnostics of V2O5 at a variable of operating power and pressure with radio frequency magnetron sputtering. Baghdad Science Journal. 2019. Vol. 16, no. 1 (sup), pp.209-214.
https://search.emarefa.net/detail/BIM-880893

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references : p. 213

Record ID

BIM-880893