Electrical characteristics, plasma parameters and reaction rates of DC O2 plasma

Abstract EN

The electrical characteristics of DC oxygen(O2) plasma such as the discharge current-voltage (I-V) curves and the breakdown voltage of oxygen gas were measured.

The plasma parameters such as electron temperature (Te) and density (ne) were obtained using Langmuir probe at a constant power over a wide rangeof O2 gas pressures.

The measured Te values were used to calculate the various rate coefficients for electron impact (ionization, dissociation and excitation) from ground state of O2 molecules.

Thereafter, the calculated rate coefficients and the measured nevalues were used to calculate the rates of ionization, dissociation and excitation from ground state of O2 molecules.

The I-V measurements of the discharge and Paschen curve show that the operating voltage decreased with increasing O2 gas pressures at constant current and the minimum of Paschen curve was found to be 400 V at Pd = 1.86 mbar.cm, respectively.

The Teshowed a decreasing trend with increasing O2 gas pressures while ne showed an increasing trend.

The rate coefficients of ionization, dissociation and excitation were found to decrease with increasing O2 gas pressure.

On the contrary, the rates of ionization, dissociation and excitation were found to increase with increasing O2 gas pressure.