High sensitive MEMS intraocular capacitive pressure sensor (Glaucoma)‎

Other Title(s)

الحساسية العالية للأنظمة الإلكترونية و الكهربائية للضغط داخل العين حساس الضغط السعوي (مرض زرق العين)‎

Joint Authors

Abbas, Tanya Muhammad
al-Qayyim, Qays Karim

Source

Journal of University of Babylon for Engineering Sciences

Issue

Vol. 26, Issue 7 (31 Jul. 2018), pp.150-163, 14 p.

Publisher

University of Babylon

Publication Date

2018-07-31

Country of Publication

Iraq

No. of Pages

14

Main Subjects

Electronic engineering

Abstract EN

Micro Electro Mechanical Systems (MEMS) are a small-scale technology that was largely adopted by the IC industry and applied to miniaturize of all systems (electrical systems, mechanical, optical, fluidic, magnetic, etc.).

Minimization has been accomplished with small manufacturing processes.

A Capacitive pressure sensor is simply a diaphragm-type device in which the diaphragm displacement is determined by measuring the capacitance change between the diaphragm and a metal plate that is close to it.

For this purpose, intraocular pressure sensors are important in detection and treatment of an incurable disease called glaucoma.

To improve the sensitivity of the capacitive pressure sensor, low stress doped polysilicon material is used as a biocompatible material.

Glaucoma is a group of eye diseases that occurs by high intraocular pressure (IOP).

IOP is the pressure exerted by the ocular fluid called aqueous humor (the clear fluid inside the eye) that fills the anterior chamber of the eye The results Shows the simulated relation between capacitance and pressure for clamped ++silicon and polysilicon clamped.

It can be seen from figure that the initial capacitance for clamped p++ silicon is about 1.81 pF the capacitance varies from 1.81 to 2.162 pF for clamped p++silicon and clamped polysilicon diaphragm, respectively, so the total variation of the capacitance.

This result shows the use of poly silicon material in diaphragm is high sensitivity than the p++ silicon.

American Psychological Association (APA)

Abbas, Tanya Muhammad& al-Qayyim, Qays Karim. 2018. High sensitive MEMS intraocular capacitive pressure sensor (Glaucoma). Journal of University of Babylon for Engineering Sciences،Vol. 26, no. 7, pp.150-163.
https://search.emarefa.net/detail/BIM-923706

Modern Language Association (MLA)

Abbas, Tanya Muhammad& al-Qayyim, Qays Karim. High sensitive MEMS intraocular capacitive pressure sensor (Glaucoma). Journal of University of Babylon for Engineering Sciences Vol. 26, no. 7 (2018), pp.150-163.
https://search.emarefa.net/detail/BIM-923706

American Medical Association (AMA)

Abbas, Tanya Muhammad& al-Qayyim, Qays Karim. High sensitive MEMS intraocular capacitive pressure sensor (Glaucoma). Journal of University of Babylon for Engineering Sciences. 2018. Vol. 26, no. 7, pp.150-163.
https://search.emarefa.net/detail/BIM-923706

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references : p. 161-162

Record ID

BIM-923706