Ion beam applications using dual ion source system

Abstract EN

In this work a dual ion source system has been designed and constructed for different applications.

It consists of two saddle field four anode rods ion sources in one system.

The electrical discharge and output ion beam characteristics were measured for each ion source at pressure equal to 2.8 x 10-4 mmHg using argon and nitrogen gases and for a dual ion source system at pressure equal to 4 x 1(H mmHg.

It is found that the total ion beam extracted from a dual ion source system at pressure equal to 4 x 10“* mmHg, discharge current equal to 1 mA and extraction voltage equal to -2 kV reach 400 DA.

Dual ion beam extracted from dual ion source system was used to form aluminum nitride, AES', layer on the surface of pure aluminum target 99.999 %.

The scanning electron microscope (SEM) was used to study and photograph the surface of the aluminum target after exposure to argon and nitrogen ion beams extracted from dual ion source system for 40 minutes.

The effect of nitrogen ion beam on the surface of stainless steel 304 specimen for 150 minutes was determined.

It is found that the surface hardness of stainless steel specimen increases about 44 %.