Micro-Optoelectromechanical Tilt Sensor
Joint Authors
Constandinou, Timothy G.
Georgiou, Julius
Source
Issue
Vol. 2008, Issue 2008 (31 Dec. 2008), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2008-04-23
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
This paper presents a novel hybrid CMOS/MEMS tilt sensor with a 5∘ resolution over a 300∘ range.
The device uses a MEMS-based semicircular mass suspended from a rigid body, projecting a shadow onto the CMOS-based optical sensor surface.
A one-dimensional photodiode array arranged as a uniformly segmented ring is then used to determine the tilt angle by detecting the position of the semicircular mass.
The complete sensor occupies an area of under 2.5 mm × 2.5 mm.
American Psychological Association (APA)
Constandinou, Timothy G.& Georgiou, Julius. 2008. Micro-Optoelectromechanical Tilt Sensor. Journal of Sensors،Vol. 2008, no. 2008, pp.1-7.
https://search.emarefa.net/detail/BIM-988135
Modern Language Association (MLA)
Constandinou, Timothy G.& Georgiou, Julius. Micro-Optoelectromechanical Tilt Sensor. Journal of Sensors No. 2008 (2008), pp.1-7.
https://search.emarefa.net/detail/BIM-988135
American Medical Association (AMA)
Constandinou, Timothy G.& Georgiou, Julius. Micro-Optoelectromechanical Tilt Sensor. Journal of Sensors. 2008. Vol. 2008, no. 2008, pp.1-7.
https://search.emarefa.net/detail/BIM-988135
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-988135
