Effects of discharge current and target thickness in Dc-magnetron sputtering on grain size of copper deposited samples
By: Yahya, Khalid Abbas; Rashid, Ban Faysal. Baghdad Science Journal. Vol. 16, no. 1 (2019), pp.84-87, 4 p.
Subjects: Copper; Electrostatic discharge; Mineral deposits; Sputtering (Physics)