Effect of electrode separation in magnetron DC plasma sputtering on grain size of gold coated samples
Other Title(s)
تأثير المسافة بين الأقطاب في الترذيذ البلازمي المغناطيسي المستمر على حجم حبيبات الذهب المطلية على النماذج
Joint Authors
Rashid, Ban Faysal
Yahya, Khalid Abbas
Source
Issue
Vol. 15, Issue 35 (31 Dec. 2017), pp.202-210, 9 p.
Publisher
University of Baghdad College of Science
Publication Date
2017-12-31
Country of Publication
Iraq
No. of Pages
9
Main Subjects
Abstract EN
In this work, an experimental research on a low voltage DC magnetron plasma sputtering (0-650) volt is used for coating gold on a glass substrate at a constant pressure of argon gas 0.2 mbar and deposition time of 30 seconds.
We focused on the effects of operating conditions for the system such as, electrode separation and sputtering current on coated samples under the influence of magnetic flux.
Electron temperature and electrons and ions densities are determined by a cylindrical single Langmuir probe.
The results show the sensitivity of electrode separation lead to change the plasma parameters.
Furthermore, the surface morphology of gold coated samples at different electrode separation and sputtering current were studied by atomic force microscopy (AFM).
The AFM analysis showed that the variation of average grain diameter and average grain height is nonlinear with a minimum value of average grain diameter 90 nm at electrode separation of 4 cm and 30 mA sputtering current.
American Psychological Association (APA)
Yahya, Khalid Abbas& Rashid, Ban Faysal. 2017. Effect of electrode separation in magnetron DC plasma sputtering on grain size of gold coated samples. Iraqi Journal of Physics،Vol. 15, no. 35, pp.202-210.
https://search.emarefa.net/detail/BIM-796777
Modern Language Association (MLA)
Yahya, Khalid Abbas& Rashid, Ban Faysal. Effect of electrode separation in magnetron DC plasma sputtering on grain size of gold coated samples. Iraqi Journal of Physics Vol. 15, no. 35 (2017), pp.202-210.
https://search.emarefa.net/detail/BIM-796777
American Medical Association (AMA)
Yahya, Khalid Abbas& Rashid, Ban Faysal. Effect of electrode separation in magnetron DC plasma sputtering on grain size of gold coated samples. Iraqi Journal of Physics. 2017. Vol. 15, no. 35, pp.202-210.
https://search.emarefa.net/detail/BIM-796777
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references : p. 210
Record ID
BIM-796777