A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology

الملخص EN

A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology.

The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor.

The inductor and capacitor were fabricated by screen-printing.

Pressure measurement is tested using a wireless mutual inductance coupling method.

The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar.

Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C.

The max readout distance is 3 cm at room temperature.

The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.