A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology
Joint Authors
Xue, Chenyang
Tan, Qiulin
Yang, Mingliang
Luo, Tao
Liu, Wei
Li, Chao
Liu, Jun
Zhang, Wendong
Xiong, Jijun
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-06-23
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
A novel passive wireless pressure sensor is proposed based on LTCC (low temperature cofired ceramic) technology.
The sensor employs a passive LC circuit, which is composed of a variable interdigital capacitor and a constant inductor.
The inductor and capacitor were fabricated by screen-printing.
Pressure measurement is tested using a wireless mutual inductance coupling method.
The experimental sensitivity of the sensor is about 273.95 kHz/bar below 2 bar.
Experimental results show that the sensor can be read out wirelessly by external antenna at 600°C.
The max readout distance is 3 cm at room temperature.
The sensors described can be applied for monitoring of gas pressure in harsh environments, such as environment with high temperature and chemical corrosion.
American Psychological Association (APA)
Tan, Qiulin& Yang, Mingliang& Luo, Tao& Liu, Wei& Li, Chao& Xue, Chenyang…[et al.]. 2014. A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology. Journal of Sensors،Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1042958
Modern Language Association (MLA)
Tan, Qiulin…[et al.]. A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology. Journal of Sensors No. 2014 (2014), pp.1-6.
https://search.emarefa.net/detail/BIM-1042958
American Medical Association (AMA)
Tan, Qiulin& Yang, Mingliang& Luo, Tao& Liu, Wei& Li, Chao& Xue, Chenyang…[et al.]. A Novel Interdigital Capacitor Pressure Sensor Based on LTCC Technology. Journal of Sensors. 2014. Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1042958
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1042958