Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties
المؤلفون المشاركون
Flege, Stefan
Hatada, Ruriko
Hanauer, Andreas
Ensinger, Wolfgang
Morimura, Takao
Baba, Koumei
المصدر
Advances in Materials Science and Engineering
العدد
المجلد 2017، العدد 2017 (31 ديسمبر/كانون الأول 2017)، ص ص. 1-8، 8ص.
الناشر
Hindawi Publishing Corporation
تاريخ النشر
2017-01-23
دولة النشر
مصر
عدد الصفحات
8
الملخص EN
Metal-containing diamond-like carbon (Me-DLC) films were prepared by a combination of plasma source ion implantation (PSII) and reactive magnetron sputtering.
Two metals were used that differ in their tendency to form carbide and possess a different sputter yield, that is, Cu with a relatively high sputter yield and Ti with a comparatively low one.
The DLC film preparation was based on the hydrocarbon gas ethylene (C2H4).
The preparation technique is described and the parameters influencing the metal content within the film are discussed.
Film properties that are changed by the metal addition, such as structure, electrical resistivity, and friction coefficient, were evaluated and compared with those of pure DLC films as well as with literature values for Me-DLC films prepared with a different hydrocarbon gas or containing other metals.
نمط استشهاد جمعية علماء النفس الأمريكية (APA)
Flege, Stefan& Hatada, Ruriko& Hanauer, Andreas& Ensinger, Wolfgang& Morimura, Takao& Baba, Koumei. 2017. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering،Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
نمط استشهاد الجمعية الأمريكية للغات الحديثة (MLA)
Flege, Stefan…[et al.]. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering No. 2017 (2017), pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
نمط استشهاد الجمعية الطبية الأمريكية (AMA)
Flege, Stefan& Hatada, Ruriko& Hanauer, Andreas& Ensinger, Wolfgang& Morimura, Takao& Baba, Koumei. Preparation of Metal-Containing Diamond-Like Carbon Films by Magnetron Sputtering and Plasma Source Ion Implantation and Their Properties. Advances in Materials Science and Engineering. 2017. Vol. 2017, no. 2017, pp.1-8.
https://search.emarefa.net/detail/BIM-1124997
نوع البيانات
مقالات
لغة النص
الإنجليزية
الملاحظات
Includes bibliographical references
رقم السجل
BIM-1124997
قاعدة معامل التأثير والاستشهادات المرجعية العربي "ارسيف Arcif"
أضخم قاعدة بيانات عربية للاستشهادات المرجعية للمجلات العلمية المحكمة الصادرة في العالم العربي
تقوم هذه الخدمة بالتحقق من التشابه أو الانتحال في الأبحاث والمقالات العلمية والأطروحات الجامعية والكتب والأبحاث باللغة العربية، وتحديد درجة التشابه أو أصالة الأعمال البحثية وحماية ملكيتها الفكرية. تعرف اكثر