Graphene Membrane as Suspended Mask for Lithography

الملخص EN

Thanks to its excellent mechanical properties, graphene is particularly suited for the realization of suspended membranes.

The present paper deals with one possible application of such membranes that is the realization of suspended lithographic masks for shadow evaporation onto a substrate.

This technique, which is largely used for realizing mesoscopic devices, where the quality requirements for the junctions prevent the exposure to ambient air and the occurrence of quantum phenomena requires highly defined structures, can be improved by the use of pure 2-dimensional masks, like graphene ones.

Advantages and differences of this material with respect to commonly employed polymers are presented and discussed.