Measurement of electron temperature (Te)‎ in a positive column by using double probe method

الملخص EN

In this work the diode planer magnetron sputtering device was designed and fabricated.

This device consists from two aluminum disc (8cm) diameter and (5mm) thick.

The distance between the two electrodes is (3cm).Design and construction double probe made from tungsten wire with (0.1mm) diameter and (1.2mm) length, to investigate the electron temperature under different argon gas pressure.

The probes was situated in the center of plasma between anode and cathode.

The effect of the argon gas pressure on electron temperature was studied as this distance.

The result of this work shown that, when the argon gas pressure increased, the electron temperature will decreased.