On MEMS Reliability and Failure Mechanisms

الملخص EN

Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics.

MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military.

The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle.

Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking.

This paper discusses reliability in the context of MEMS functionality.

It also presents a brief review of the most relevant failure mechanisms for MEMS.