On MEMS Reliability and Failure Mechanisms
Joint Authors
Sequera, Miguel
Fonseca, Daniel J.
Source
International Journal of Quality, Statistics, and Reliability
Issue
Vol. 2011, Issue 2011 (31 Dec. 2011), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2011-11-03
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Economics & Business Administration
Economy
Abstract EN
Microelectromechanical systems (MEMS) are a fast-growing field in microelectronics.
MEMS are commonly used as actuators and sensors with a wide variety of applications in health care, automotives, and the military.
The MEMS production cycle can be classified as three basic steps: (1) design process, (2) manufacturing process, and (3) operating cycle.
Several studies have been conducted for steps (1) and (2); however, information regarding operational failure modes in MEMS is lacking.
This paper discusses reliability in the context of MEMS functionality.
It also presents a brief review of the most relevant failure mechanisms for MEMS.
American Psychological Association (APA)
Fonseca, Daniel J.& Sequera, Miguel. 2011. On MEMS Reliability and Failure Mechanisms. International Journal of Quality, Statistics, and Reliability،Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-500730
Modern Language Association (MLA)
Fonseca, Daniel J.& Sequera, Miguel. On MEMS Reliability and Failure Mechanisms. International Journal of Quality, Statistics, and Reliability No. 2011 (2011), pp.1-7.
https://search.emarefa.net/detail/BIM-500730
American Medical Association (AMA)
Fonseca, Daniel J.& Sequera, Miguel. On MEMS Reliability and Failure Mechanisms. International Journal of Quality, Statistics, and Reliability. 2011. Vol. 2011, no. 2011, pp.1-7.
https://search.emarefa.net/detail/BIM-500730
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-500730
