Effect of argon and oxygen pressure on Zn magnetron plasma produced by RF power supply

الملخص EN

In this work, the plasma parameters (electron temperature and electron density) were determined by optical emission spectroscopy (OES) produced by the RF magnetron Zn plasma produced by oxygen and argon at different working pressure.

The spectrum was recorded by spectrometer supplied with CCD camera, computer and NIST standard of neutral and ionic lines of Zn, argon and oxygen.

The effects of pressure on plasma parameters were studied and a comparison between the two gasses was made.