Effect of argon and oxygen pressure on Zn magnetron plasma produced by RF power supply

Other Title(s)

تأثير ضغط الاركون و الأوكسجين على بلازما الخارصين الممغنطة و المتولدة بواسطة مجهز قدرة ذو الترددات الراديوية

Joint Authors

Dawud, Harith Muthanna
Husayn, Ali Abd al-Karim
Adim, Kazim Abd al-Wahid

Source

Iraqi Journal of Physics

Issue

Vol. 15, Issue 34 (31 Dec. 2017), pp.65-71, 7 p.

Publisher

University of Baghdad College of Science

Publication Date

2017-12-31

Country of Publication

Iraq

No. of Pages

7

Main Subjects

Physics

Abstract EN

In this work, the plasma parameters (electron temperature and electron density) were determined by optical emission spectroscopy (OES) produced by the RF magnetron Zn plasma produced by oxygen and argon at different working pressure.

The spectrum was recorded by spectrometer supplied with CCD camera, computer and NIST standard of neutral and ionic lines of Zn, argon and oxygen.

The effects of pressure on plasma parameters were studied and a comparison between the two gasses was made.

American Psychological Association (APA)

Adim, Kazim Abd al-Wahid& Husayn, Ali Abd al-Karim& Dawud, Harith Muthanna. 2017. Effect of argon and oxygen pressure on Zn magnetron plasma produced by RF power supply. Iraqi Journal of Physics،Vol. 15, no. 34, pp.65-71.
https://search.emarefa.net/detail/BIM-754730

Modern Language Association (MLA)

Adim, Kazim Abd al-Wahid…[et al.]. Effect of argon and oxygen pressure on Zn magnetron plasma produced by RF power supply. Iraqi Journal of Physics Vol. 15, no. 34 (2017), pp.65-71.
https://search.emarefa.net/detail/BIM-754730

American Medical Association (AMA)

Adim, Kazim Abd al-Wahid& Husayn, Ali Abd al-Karim& Dawud, Harith Muthanna. Effect of argon and oxygen pressure on Zn magnetron plasma produced by RF power supply. Iraqi Journal of Physics. 2017. Vol. 15, no. 34, pp.65-71.
https://search.emarefa.net/detail/BIM-754730

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references : p. 71

Record ID

BIM-754730