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The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films
Joint Authors
Chen, Ying-Chung
Chang, Wei-Tsai
Kao, Kuo-Sheng
Yang, Chun-Hung
Cheng, Chien-Chuan
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-11-19
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Abstract EN
Dual-mode thin film bulk acoustic resonator (TFBAR) devices are fabricated with c-axis tilted AlN films.
To fabricate dual-mode TFBAR devices, the off-axis RF magnetron sputtering method for the growth of tilted piezoelectric AlN thin films is adopted.
In this report, the AlN thin films are deposited with tilting angles of 15° and 23°.
The frequency response of the TFBAR device with 23° tilted AlN thin film is measured to reveal its ability to provide dual-mode resonance.
The sensitivities of the longitudinal and shear modes to mass loading are calculated to be 2295 Hz cm2/ng and 1363 Hz cm2/ng with the mechanical quality factors of 480 and 287, respectively.
The sensitivities of the longitudinal and shear modes are calculated to be 0 and 15 Hz cm2/μg for liquid loading.
American Psychological Association (APA)
Chen, Ying-Chung& Chang, Wei-Tsai& Kao, Kuo-Sheng& Yang, Chun-Hung& Cheng, Chien-Chuan. 2013. The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1031322
Modern Language Association (MLA)
Chen, Ying-Chung…[et al.]. The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films. Journal of Nanomaterials No. 2013 (2013), pp.1-8.
https://search.emarefa.net/detail/BIM-1031322
American Medical Association (AMA)
Chen, Ying-Chung& Chang, Wei-Tsai& Kao, Kuo-Sheng& Yang, Chun-Hung& Cheng, Chien-Chuan. The Liquid Sensor Using Thin Film Bulk Acoustic Resonator with C-Axis Tilted AlN Films. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-8.
https://search.emarefa.net/detail/BIM-1031322
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1031322