Influence of Annealing Temperature on the Characteristics of Ti-Codoped GZO Thin Solid Film
Joint Authors
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-07-28
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
This study utilizes radio frequency magnetron sputtering (RF sputtering) to deposit GZO transparent conductive film and Ti thin film on the same corning glass substrate and then treats GZO/Ti thin film with rapid thermal annealing.
The annealing temperatures are 300°C , 500°C, and 550°C, respectively.
Ti:GZO transparent conductive oxide (TCO) thin films are deposited on glass substrates using a radio frequency magnetron sputtering technique.
The thin films are then annealed at temperatures of 300°C, 500°C, and 550°C, respectively, for rapid thermal annealing.
The effects of the annealing temperature on the optical properties, resistivity, and nanomechanical properties of the Ti:GZO thin films are then systematically explored.
The results show that all of the annealed films have excellent transparency (~90%) in the visible light range.
Moreover, the resistivity of the Ti:GZO films reduces with an increasing annealing temperature, while the carrier concentration and Hall mobility both increase.
Finally, the hardness and Young’s modulus of the Ti:GZO thin films are both found to increase as the annealing temperature is increased.
American Psychological Association (APA)
Chen, Tao-Hsing& Liao, Tzu-Yu. 2013. Influence of Annealing Temperature on the Characteristics of Ti-Codoped GZO Thin Solid Film. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031422
Modern Language Association (MLA)
Chen, Tao-Hsing& Liao, Tzu-Yu. Influence of Annealing Temperature on the Characteristics of Ti-Codoped GZO Thin Solid Film. Journal of Nanomaterials No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-1031422
American Medical Association (AMA)
Chen, Tao-Hsing& Liao, Tzu-Yu. Influence of Annealing Temperature on the Characteristics of Ti-Codoped GZO Thin Solid Film. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1031422
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1031422