Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography
Joint Authors
Morris, Michael A.
Rasappa, Sozaraj
Schulte, Lars
Borah, Dipu
Ndoni, Sokol
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-11-13
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
This paper describes the fabrication of nanodimensioned silicon structures on silicon wafers from thin films of a poly(styrene)-block-poly(dimethylsiloxane) (PS-b-PDMS) block copolymer (BCP) precursor self-assembling into cylindrical morphology in the bulk.
The structure alignment of the PS-b-PDMS (33 k–17 k) was conditioned by applying solvent and solvothermal annealing techniques.
BCP nanopatterns formed after the annealing process have been confirmed by scanning electron microscope (SEM) after removal of upper PDMS wetting layer by plasma etching.
Silicon nanostructures were obtained by subsequent plasma etching to the underlying substrate by an anisotropic dry etching process.
SEM images reveal the formation of silicon nanostructures, notably of sub-15 nm dimensions.
American Psychological Association (APA)
Rasappa, Sozaraj& Schulte, Lars& Borah, Dipu& Morris, Michael A.& Ndoni, Sokol. 2013. Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography. Journal of Nanomaterials،Vol. 2013, no. 2013, pp.1-7.
https://search.emarefa.net/detail/BIM-1031590
Modern Language Association (MLA)
Rasappa, Sozaraj…[et al.]. Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography. Journal of Nanomaterials No. 2013 (2013), pp.1-7.
https://search.emarefa.net/detail/BIM-1031590
American Medical Association (AMA)
Rasappa, Sozaraj& Schulte, Lars& Borah, Dipu& Morris, Michael A.& Ndoni, Sokol. Sub-15 nm Silicon Lines Fabrication via PS-b-PDMS Block Copolymer Lithography. Journal of Nanomaterials. 2013. Vol. 2013, no. 2013, pp.1-7.
https://search.emarefa.net/detail/BIM-1031590
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1031590