Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide
Joint Authors
Latek, Mariusz
Taube, A.
Rzodkiewicz, W.
Gierałtowska, S.
Borowicz, Paweł
Source
Issue
Vol. 2013, Issue 2013 (31 Dec. 2013), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2013-08-29
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Medicine
Information Technology and Computer Science
Abstract EN
Three samples with dielectric layers from high-κ dielectrics, hafnium oxide, gadolinium-silicon oxide, and lanthanum-lutetium oxide on silicon substrate were studied by Raman spectroscopy.
The results obtained for high-κ dielectrics were compared with spectra recorded for silicon dioxide.
Raman spectra suggest the similarity of gadolinium-silicon oxide and lanthanum-lutetium oxide to the bulk nondensified silicon dioxide.
The temperature treatment of hafnium oxide shows the evolution of the structure of this material.
Raman spectra recorded for as-deposited hafnium oxide are similar to the results obtained for silicon dioxide layer.
After thermal treatment especially at higher temperatures (600°C and above), the structure of hafnium oxide becomes similar to the bulk non-densified silicon dioxide.
American Psychological Association (APA)
Borowicz, Paweł& Taube, A.& Rzodkiewicz, W.& Latek, Mariusz& Gierałtowska, S.. 2013. Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide. The Scientific World Journal،Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1032657
Modern Language Association (MLA)
Borowicz, Paweł…[et al.]. Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide. The Scientific World Journal No. 2013 (2013), pp.1-6.
https://search.emarefa.net/detail/BIM-1032657
American Medical Association (AMA)
Borowicz, Paweł& Taube, A.& Rzodkiewicz, W.& Latek, Mariusz& Gierałtowska, S.. Raman Spectra of High-κ Dielectric Layers Investigated with Micro-Raman Spectroscopy Comparison with Silicon Dioxide. The Scientific World Journal. 2013. Vol. 2013, no. 2013, pp.1-6.
https://search.emarefa.net/detail/BIM-1032657
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1032657