Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy
Joint Authors
Chang, Shang-Chou
Li, To-Sing
Lin, Tien-Chai
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-6, 6 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-05-29
Country of Publication
Egypt
No. of Pages
6
Main Subjects
Abstract EN
This work investigates the thermal effect on the structural, electrical, and optical properties of aluminum doped zinc oxide (AZO) films.
The AZO films deposited at different temperatures were measured using a thermal desorption system to obtain their corresponding thermal desorption spectroscopy (TDS).
In addition to obtaining information of thermal desorption, the measurement of TDS also has the effect of vacuum annealing on the AZO films.
The results of measuring TDS imply part of the doped aluminum atoms do not stay at substituted zinc sites in AZO films.
The (002) preferential direction of the AZO films in X-ray diffraction spectra shifts to a lower angle after measurement of TDS.
The grain size grows and surface becomes denser for all AZO films after measurement of TDS.
The carrier concentration, mobility, and average optical transmittance increase while the electrical resistivity decreases for AZO films after measurement of TDS.
These results indicate that the AZO films deposited at 200°C are appropriate selections if the AZO films are applied in device fabrication of heat-produced process.
American Psychological Association (APA)
Chang, Shang-Chou& Lin, Tien-Chai& Li, To-Sing. 2014. Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy. Journal of Nanomaterials،Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1041806
Modern Language Association (MLA)
Chang, Shang-Chou…[et al.]. Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy. Journal of Nanomaterials No. 2014 (2014), pp.1-6.
https://search.emarefa.net/detail/BIM-1041806
American Medical Association (AMA)
Chang, Shang-Chou& Lin, Tien-Chai& Li, To-Sing. Thermal Effect on the Structural, Electrical, and Optical Properties of In-Line Sputtered Aluminum Doped Zinc Oxide Films Explored with Thermal Desorption Spectroscopy. Journal of Nanomaterials. 2014. Vol. 2014, no. 2014, pp.1-6.
https://search.emarefa.net/detail/BIM-1041806
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1041806