Effects of Hydrogen on the Optical and Electrical Characteristics of the Sputter-Deposited Al2O3-Doped ZnO Thin Films
Joint Authors
Wang, Fang-Hsing
Liou, Jian-Chiun
Chen, In-Ching
Yang, Cheng-Fu
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-7, 7 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-02-27
Country of Publication
Egypt
No. of Pages
7
Main Subjects
Abstract EN
In this study, AZO thin films were deposited on glass by using a 98 mol% ZnO + 1 mol% Al2O3 (AZO, Zn : Al = 98 : 2) ceramic target and a r.f.
magnetron sputtering system.
At first, the effects of different H2 flow rates (H2/(H2 + Ar) = 0%~9.09%, abbreviated as H2-deposited AZO thin films, deposition temperature was 200°C) added during the deposition process on the physical and electrical properties of AZO thin films were investigated.
The optical transmittance at 400 nm~700 nm is more than 80% for all AZO thin films regardless of H2 flow rate and the transparency ratio decreased as the H2 flow rate increased.
The Burstein-Moss shift effect was used to prove that the defects of AZO thin films decreased with increasing H2 flow rate.
Also, the 2% H2-deposited AZO thin films were also treated by the H2 plasma at room temperature for 60 min (plasma-treated AZO thin films).
The value variations in the optical band gap ( E g ) values of the H2-deposited and plasma-treated AZO thin films were evaluated from the plots of α h ν 2 = c ( h ν − E g ) , and the E g values increased with increasing H2 flow rate.
The E g values also increased as the H2-plasma process was used to treat on the H2-deposited Al2O3-doped ZnO (AZO) thin films.
American Psychological Association (APA)
Wang, Fang-Hsing& Yang, Cheng-Fu& Liou, Jian-Chiun& Chen, In-Ching. 2014. Effects of Hydrogen on the Optical and Electrical Characteristics of the Sputter-Deposited Al2O3-Doped ZnO Thin Films. Journal of Nanomaterials،Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1041990
Modern Language Association (MLA)
Wang, Fang-Hsing…[et al.]. Effects of Hydrogen on the Optical and Electrical Characteristics of the Sputter-Deposited Al2O3-Doped ZnO Thin Films. Journal of Nanomaterials No. 2014 (2014), pp.1-7.
https://search.emarefa.net/detail/BIM-1041990
American Medical Association (AMA)
Wang, Fang-Hsing& Yang, Cheng-Fu& Liou, Jian-Chiun& Chen, In-Ching. Effects of Hydrogen on the Optical and Electrical Characteristics of the Sputter-Deposited Al2O3-Doped ZnO Thin Films. Journal of Nanomaterials. 2014. Vol. 2014, no. 2014, pp.1-7.
https://search.emarefa.net/detail/BIM-1041990
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1041990