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Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing
Joint Authors
Miyake, Shojiro
Kim, Jongduk
Wang, Mei
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-19, 19 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-05-11
Country of Publication
Egypt
No. of Pages
19
Main Subjects
Abstract EN
This paper reviews silicon nanofabrication processes using atomic force microscopy (AFM).
In particular, it summarizes recent results obtained in our research group regarding AFM-based silicon nanofabrication through mechanochemical local oxidation by diamond tip sliding, as well as mechanical, electrical, and electromechanical processing using an electrically conductive diamond tip.
Microscopic three-dimensional manufacturing mainly relies on etching, deposition, and lithography.
Therefore, a special emphasis was placed on nanomechanical processes, mechanochemical reaction by potassium hydroxide solution etching, and mechanical and electrical approaches.
Several important surface characterization techniques consisting of scanning tunneling microscopy and related techniques, such as scanning probe microscopy and AFM, were also discussed.
American Psychological Association (APA)
Miyake, Shojiro& Wang, Mei& Kim, Jongduk. 2014. Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing. Journal of Nanotechnology،Vol. 2014, no. 2014, pp.1-19.
https://search.emarefa.net/detail/BIM-1042183
Modern Language Association (MLA)
Miyake, Shojiro…[et al.]. Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing. Journal of Nanotechnology No. 2014 (2014), pp.1-19.
https://search.emarefa.net/detail/BIM-1042183
American Medical Association (AMA)
Miyake, Shojiro& Wang, Mei& Kim, Jongduk. Silicon Nanofabrication by Atomic Force Microscopy-Based Mechanical Processing. Journal of Nanotechnology. 2014. Vol. 2014, no. 2014, pp.1-19.
https://search.emarefa.net/detail/BIM-1042183
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1042183