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Enhanced Temperature Control Method Using ANFIS with FPGA
Joint Authors
Pan, Shing-Tai
Huang, Chiung-Wei
Zhou, Jun-Tin
Chang, Cheng-Yuan
Source
Issue
Vol. 2014, Issue 2014 (31 Dec. 2014), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2014-03-04
Country of Publication
Egypt
No. of Pages
8
Main Subjects
Medicine
Information Technology and Computer Science
Abstract EN
Temperature control in etching process is important for semiconductor manufacturing technology.
However, pressure variations in vacuum chamber results in a change in temperature, worsening the accuracy of the temperature of the wafer and the speed and quality of the etching process.
This work develops an adaptive network-based fuzzy inference system (ANFIS) using a field-programmable gate array (FPGA) to improve the effectiveness.
The proposed method adjusts every membership function to keep the temperature in the chamber stable.
The improvement of the proposed algorithm is confirmed using a medium vacuum (MV) inductively-coupled plasma- (ICP-) type etcher.
American Psychological Association (APA)
Huang, Chiung-Wei& Pan, Shing-Tai& Zhou, Jun-Tin& Chang, Cheng-Yuan. 2014. Enhanced Temperature Control Method Using ANFIS with FPGA. The Scientific World Journal،Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1048842
Modern Language Association (MLA)
Huang, Chiung-Wei…[et al.]. Enhanced Temperature Control Method Using ANFIS with FPGA. The Scientific World Journal No. 2014 (2014), pp.1-8.
https://search.emarefa.net/detail/BIM-1048842
American Medical Association (AMA)
Huang, Chiung-Wei& Pan, Shing-Tai& Zhou, Jun-Tin& Chang, Cheng-Yuan. Enhanced Temperature Control Method Using ANFIS with FPGA. The Scientific World Journal. 2014. Vol. 2014, no. 2014, pp.1-8.
https://search.emarefa.net/detail/BIM-1048842
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1048842