Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films
Joint Authors
Source
Advances in Materials Science and Engineering
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-8, 8 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-03-09
Country of Publication
Egypt
No. of Pages
8
Abstract EN
Cu thin films were deposited on Si substrates using direct current (DC) magnetron sputtering.
Microstructure evolution and mechanical properties of Cu thin films with different annealing temperatures were investigated by atomic force microscopy (AFM), X-ray diffraction (XRD), and nanoindentation.
The surface morphology, roughness, and grain size of the Cu films were characterized by AFM.
The minimization of energy including surface energy, interface energy, and strain energy (elastic strain energy and plastic strain energy) controlled the microstructural evolution.
A classical Hall-Petch relationship was exhibited between the yield stress and grain size.
The residual stress depended on crystal orientation.
The residual stress as-deposited was of tension and decreased with decreasing of (111) orientation.
The ratio of texture coefficient of (111)/(220) can be used as a merit for the state of residual stress.
American Psychological Association (APA)
Du, Shiwen& Li, Yongtang. 2015. Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films. Advances in Materials Science and Engineering،Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1053771
Modern Language Association (MLA)
Du, Shiwen& Li, Yongtang. Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films. Advances in Materials Science and Engineering No. 2015 (2015), pp.1-8.
https://search.emarefa.net/detail/BIM-1053771
American Medical Association (AMA)
Du, Shiwen& Li, Yongtang. Effect of Annealing on Microstructure and Mechanical Properties of Magnetron Sputtered Cu Thin Films. Advances in Materials Science and Engineering. 2015. Vol. 2015, no. 2015, pp.1-8.
https://search.emarefa.net/detail/BIM-1053771
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1053771