Diamond Based Field-Effect Transistors of Zr Gate with SiNx Dielectric Layers

Joint Authors

Wang, W.
Hu, C.
Li, S. Y.
Li, F. N.
Liu, Z. C.
Wang, F.
Fu, J.
Wang, H. X.

Source

Journal of Nanomaterials

Issue

Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-5, 5 p.

Publisher

Hindawi Publishing Corporation

Publication Date

2015-10-25

Country of Publication

Egypt

No. of Pages

5

Main Subjects

Chemistry
Civil Engineering

Abstract EN

Investigation of Zr-gate diamond field-effect transistor with SiNx dielectric layers (SD-FET) has been carried out.

SD-FET works in normally on depletion mode with p-type channel, whose sheet carrier density and hole mobility are evaluated to be 2.17 × 1013 cm−2 and 24.4 cm2·V−1·s−1, respectively.

The output and transfer properties indicate the preservation of conduction channel because of the SiNx dielectric layer, which may be explained by the interface bond of C-N.

High voltage up to −200 V is applied to the device, and no breakdown is observed.

For comparison, another traditional surface channel FET (SC-FET) is also fabricated.

American Psychological Association (APA)

Wang, W.& Hu, C.& Li, S. Y.& Li, F. N.& Liu, Z. C.& Wang, F.…[et al.]. 2015. Diamond Based Field-Effect Transistors of Zr Gate with SiNx Dielectric Layers. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1068736

Modern Language Association (MLA)

Wang, W.…[et al.]. Diamond Based Field-Effect Transistors of Zr Gate with SiNx Dielectric Layers. Journal of Nanomaterials No. 2015 (2015), pp.1-5.
https://search.emarefa.net/detail/BIM-1068736

American Medical Association (AMA)

Wang, W.& Hu, C.& Li, S. Y.& Li, F. N.& Liu, Z. C.& Wang, F.…[et al.]. Diamond Based Field-Effect Transistors of Zr Gate with SiNx Dielectric Layers. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-5.
https://search.emarefa.net/detail/BIM-1068736

Data Type

Journal Articles

Language

English

Notes

Includes bibliographical references

Record ID

BIM-1068736