Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)a-C:H Films Prepared through Magnetron Sputtering Deposition
Joint Authors
Hao, Junying
Liu, Xiaoqiang
Yang, Hu
Lin, Xiuzhou
Zeng, Xianguang
Source
Issue
Vol. 2015, Issue 2015 (31 Dec. 2015), pp.1-9, 9 p.
Publisher
Hindawi Publishing Corporation
Publication Date
2015-10-04
Country of Publication
Egypt
No. of Pages
9
Main Subjects
Abstract EN
Hydrogenated amorphous carbon films codoped with Si and Al ((Si, Al)/a-C:H) were deposited through radio frequency (RF, 13.56 MHz) magnetron sputtering on Si (100) substrate at different temperatures.
The composition and structure of the films were investigated by means of X-ray photoelectron spectroscopy (XPS), TEM, and Raman spectra, respectively.
The substrate temperature effect on microstructure and mechanical and tribological properties of the films was studied.
A structural transition of the films from nanoparticle containing to fullerene-like was observed.
Correspondingly, the mechanical properties of the films also had obvious transition.
The tribological results in ambient air showed that high substrate temperature (>573 K) was disadvantage of wear resistance of the films albeit in favor of formation of ordering carbon clusters.
Particularly, the film deposited at temperature of 423 K had an ultralow friction coefficient of about 0.01 and high wear resistance.
American Psychological Association (APA)
Liu, Xiaoqiang& Hao, Junying& Yang, Hu& Lin, Xiuzhou& Zeng, Xianguang. 2015. Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)a-C:H Films Prepared through Magnetron Sputtering Deposition. Journal of Nanomaterials،Vol. 2015, no. 2015, pp.1-9.
https://search.emarefa.net/detail/BIM-1068807
Modern Language Association (MLA)
Liu, Xiaoqiang…[et al.]. Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)a-C:H Films Prepared through Magnetron Sputtering Deposition. Journal of Nanomaterials No. 2015 (2015), pp.1-9.
https://search.emarefa.net/detail/BIM-1068807
American Medical Association (AMA)
Liu, Xiaoqiang& Hao, Junying& Yang, Hu& Lin, Xiuzhou& Zeng, Xianguang. Substrate Temperature Effect on the Microstructure and Properties of (Si, Al)a-C:H Films Prepared through Magnetron Sputtering Deposition. Journal of Nanomaterials. 2015. Vol. 2015, no. 2015, pp.1-9.
https://search.emarefa.net/detail/BIM-1068807
Data Type
Journal Articles
Language
English
Notes
Includes bibliographical references
Record ID
BIM-1068807